Taiwan Semiconductor Manufacturing Comp. Ltd.

Che-wei Chen

Dun-Nian Yaung

Jen-Cheng Liu

Min-Feng Kao

Hsing-Chih Lin

An image sensor includes a substrate including a first surface and a second surface opposite to the first surface; a plurality of pixel sensors disposed in the substrate, a sensor isolation feature disposed in the substrate defining an active region, and a dielectric layer between the sensor isolation feature and the substrate, wherein the sensor isolation feature comprises a conductive material.

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HSINCHU, Taiwan

Che-wei Chen