Industrial Technology Research Institute

Chau Shioung Yeh

Yi Chun Chen

Jyi Tyan Yeh

Kuo Tung Huang

You Chia Chang

Yu Tsung Chiu

Yeong Feng Wang

Jiunn Woei Liaw

Chun Ti Chen

Ding Zheng Lin

Liang Bin Yu

Chyan Chi Wu

Chih Kung Lee

Chih King Lee

The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

Optical head capable of providing a subwavelength beams

Growing community of inventors

Taipei, Taiwan

Chau Shioung Yeh