Centre National De La Recherche Scientifique

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Office Nathional D'etudes Et De Recherches Aerospatiales—onera—chemie De La Huniere

Office National D'etudes Et De Recherches Aerospatiales

Charlie Koechlin

Jean-Jacques Yon

Jean-Luc Pelouard

Riad Haidar

Fabrice Pardo

Patrick Bouchon

Joël Deschamps

Stéphane Collin

According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers () of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane () suspended above said supporting substrate, said membrane consisting of an element () for absorbing the incident radiation and a thermometric element () in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (), a dielectric film (), and a second metallic film (), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane () is less than or equal to half of the total area of the microbolometer pixel.

Microbolometer array with improved performance

Growing community of inventors

Bourg la Reine, France

Charlie Koechlin