Entegris, Inc.

Colder Products Company

Charles W Extrand

Sung In Moon

David Alan Burdge

Koray Sekeroglu

Michael Wright

George Gonnella

Richard A Cooke

John E Pillion

Ralph Henderer

Frank Manganiello

Anthony Gargano

Keith Gossen

This document describes devices and methods for reducing liquid spillage, such as fluid coupling devices that include one or more apertures that reduce spillage when the fluid coupling devices are disconnected. In some embodiments, the one or more apertures are designed with features to increase a level of acceleration that liquid within an internal volume of the fluid coupling devices would need to be exposed to in order to spill from the internal volume via the one or more apertures.

Fluid handling components

A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85&#xb0; C. and 100&#xb0; C.

Sensor with protective layer

Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 10to about 10ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

Diamond like carbon coating of substrate housings

A fluid handling device with an anisotropic wetting surface including a substrate with a multiplicity of asymmetric substantially uniformly shaped asperities thereon. Each asperity has a first asperity rise angle and a second asperity rise angle relative to the substrate. The asperities are structured to present a desired retentive force ratio (f/f) greater or less than unity caused by asymmetry between the first asperity rise angle and the second asperity rise angle according to the formula: f/f=sin(&#x3c9;+&#xbd;&#x394;&#x3b8;)/sin(&#x3c9;+&#xbd;&#x394;&#x3b8;).

Fluid handling device with directionally-biased wetting surface

A sealing system, sealing system components, and methods of manufacture and use for a vessel that holds corrosive liquid, with the sealing system having a port on the vessel, an insert, and a sealing element. The sealing element is corrosion-resistant, essentially impermeable to corrosive and critical fluids, essentially free of leachable impurities and is made with a material having a Shore A hardness between about 70 and about 95. A preferred material for the sealing ring is the class of materials known as polyolefins. The insert is operably engageable with the port and the sealing element to create a seal between the sealing element and the first and second sealing surfaces to prevent fluid flow through the port.

Sealing system for ports of vessels used for corrosive fluids

A tray for handling and retaining a plurality of components, wherein the tray has a rigid body portion and an elastomeric contact layer. The contact layer has a planar upper surface for contacting and retaining the components, and may be formed from a thermoplastic material having a surface energy between 20 dyne/cm and 100 dyne/cm, a hardness of between about Shore A15 and Shore D75, and a surface electrical resistivity of between about 1&#xd7;10ohms/square and 1&#xd7;10ohms/square.

Chip tray with tacky surface

A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily 'roll off' without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.

Wafer carrier with ultraphobic surfaces

A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the tray carrier. In the invention, entire surfaces or portions of surfaces of a tray carrier are made ultraphobic. The ultraphobic surfaces of the tray carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily 'roll off' without leaving a liquid film or substantial quantity of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality and facilitating economical reuse of the tray carrier. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.

Tray carrier with ultraphobic surfaces

A tray for handling and retaining a plurality of small components comprising a rigid body portion with a plurality of pockets formed therein. Each of the pockets has an elastomeric contact surface for contacting and retaining a component. The contact surface may be formed from a thermoplastic material having a surface energy between 20 dyne/cm and 100 dyne/cm, and a surface electrical resistivity of between about 1&#xd7;10ohms/square and 1&#xd7;10ohms/square. The material for the contact portion may be urethane, polybutylene terephthalate, polyolefin, polyethylene terephthalate, styrenic block co-polymer, styrene-butadiene rubber, polyether block polyamide, or polypropylene/crosslinked EDPM rubber. The body portion may be formed from acrylonitrile-butadiene-styrene, polycarbonate, urethane, polyphenylene sulfide, polystyrene, polymethyl methacrylate, polyetherketone, polyetheretherketone, polyetherketoneketone, polyether imide, polysulfone, styrene acrylonitrile, polyethylene, polypropylene, fluoropolymer, polyolefin, or nylon. The body portion may have a peripheral border region and a downwardly projecting skirt portion to facilitate stacking of multiple trays.

Matrix tray with tacky surfaces

A microfluidic device having durable ultraphobic fluid contact surfaces in the fluid flow channels of the device. The ultraphobic surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed in a regular array so that the surface has a predetermined contact line density equal to or greater than a critical contact line density, and so that the ratio of the cross-sectional dimension of the asperities to the spacing dimension of the asperities is less than or equal to 0.1.

Microfluidic device with ultraphobic surfaces

A fuel cell with components having durable ultraphobic surfaces at selected locations where condensation of water may occur. The ultraphobic surface generally includes a substrate portion with a multiplicity of projecting microscale or nanoscale asperities disposed so that the surface has a predetermined contact line density equal to or greater than a critical contact line density.

Fuel cell with ultraphobic surfaces

A durable ultraphobic surface that is capable of retaining ultraphobic properties at liquid pressures of one atmosphere and above. The surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed so that the surface has a predetermined contact line density measured in meters of contact line per square meter of surface area equal to or greater than a contact line density value '&#x39b;' determined according to the formula:where &#x3b3; is the surface tension of the liquid in Newtons per meter, &#x3b8;is the experimentally measured true advancing contact angle of the liquid on the asperity material in degrees, and &#x3c9; is the asperity rise angle in degrees.

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Minneapolis, MN, United States of America

Charles W Extrand