Gte Products Corporation

Charles S Purinton

Edward D Parent

Charles W Sutter

A refractory metal silicide sputtering target is made by reacting refractory metal and silicon to about 70 to 90% completion of the reaction, comminuting the material, and then vacuum hot pressing the comminuted material to a high density compact.

Refractory metal silicide sputtering target

A refractory metal silicide sputtering target is made by reacting refractory metal and silicon to about 70 to 90% completion of the reaction, comminuting the material, and then vacuum hot pressing the comminuted material to a high density compact having a theoretical density greater than about 95 percent and forming the metal silicide.

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Byfield, MA, United States of America

Charles S Purinton