Delta Design, Inc.

Kryotech, Inc.

Charles R Schmidt, Jr

Ian G Spearing

Lewis S Wayburn

Charles B Wall

Terry Craps

Matthew F W Brown

An apparatus and method for controlling the temperature of an electronic device under test utilizes a thermal head spaced apart from a movable support structure by a mechanical isolation assembly. The support structure has a manifold configured to route refrigerant fluid between the evaporator head and components of a refrigeration system. The mechanical isolation assembly is configured to compensate for variations in the planar orientation of the device under test. Moreover, the mechanical isolation assembly preferably includes bellows through which the refrigerant fluid is conducted.

Apparatus and method having mechanical isolation arrangement for controlling the temperature of an electronic device under test

An apparatus and method for controlling the temperature of an integrated circuit device includes a refrigerant system having a coolant loop containing refrigerant, an evaporator, a compressor, and a condenser. The condenser has a variable speed fan controlled to maintain the temperature of the refrigerant at a predetermined value. In a refrigeration system used to cool an integrated circuit device, a method for controlling refrigerant pressure by comparing the refrigerant temperature at a predetermined location to a predetermined value and varying the cooling applied to the condenser.

Apparatus and method for controlling the temperature of an integrated circuit device

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Lexington, SC, United States of America

Charles R Schmidt, Jr