Veeco Instruments Inc.

Digital Instruments

Charles R Meyer

John A Gurley

Brian Dale Ross

James M Young

Alnawaz Rehemtulla

Virgil B Elings

David A Grigg

Lin Huang

Thomas L Chenevert

Jason Osborne

Craig B Prater

Paul I Mininni

Frank D Yashar

William H Hertzog

Craig J Galban

Kenneth Pienta

Thomas Chenevert

Anne Schott

A method and apparatus of engaging a probe with a sample surface including automatically reducing the spacing between a probe of a probe based instrument and a sample from an initial separation to one in which the probe is positioned for obtaining a sample surface measurement in less than ten seconds without damaging either the probe or the sample. The method includes oscillating the probe, measuring at least one parameter of probe oscillation and then engaging the probe and the sample by generally continuously controlling the reducing step based on the measuring step to reduce the separation from an initial separation to an engage position. In addition to feeding back directly on the tip-sample interaction, a direct communication line is provided between the processor used to generate control signals that govern the engage and a conventional motion controller. In an alternative, a coarse positioning actuator and a fine positioning actuator in which the control of both is coordinated under feedback to place the probe in the engaged position, and wherein the close approach phase of the algorithm is controlled by a dedicated real time controller.

Method and apparatus for rapid automatic engagement of a probe

A cantilever probe-based instrument is controlled to reduce the lateral loads imposed on the probe as a result of probe/sample interaction. In a preferred embodiment, the probe tip and/or sample are driven to move laterally relative to one another as a function of cantilever deflection in order to compensate for lateral tip motion that would otherwise be caused by cantilever deflection. In the case of a probe having a passive cantilever, the sample and/or the probe as a whole are driven to move laterally to obtain the desired magnitude of compensation as direct function of cantilever deflection. In the case of a probe having an active cantilever, the sample or probe may be moved as a function of cantilever drive signal, or the cantilever may be controlled to bend as a function of cantilever drive signal so that the tip moves to obtain the desired magnitude of compensation.

Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument

A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a storage cassette or a wafer, a selected probe is aligned to a detection system, and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signals from the probe detection system or by forming an optical image of the probe using a camera or similar technique and determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

Scanning probe microscope having automatic probe exchange and alignment

A stiffener assembly which provides for improved performance of a movable stage arrangement. Often, it is desired to provide a movable stage arrangement in which a stage moves linearly with respect to a stationary base. In many applications, it is necessary for the stage to move to successive rest positions, with movement of the stage inhibited at each of the reset positions. The stiffener of the present invention allows for controlled movement of a stage along its direction of travel, with the stiffener inhibiting undesired movement when the stage is at a rest position. In one form, a stiffener extends in the direction of travel of the stage, with one end of the stiffener assembly mounted to the stationary base, and the other end urged into frictional contact with the movable stage by a force applicator. As a result, the stiffener is placed in frictional contact with the movable stage. The coupling of the stage to the stiffener is insufficient to impede desired movement of the stage, however undesired movement at rest positions of the stage are avoided.

Stiffness enhancer for movable stage assembly

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Santa Barbara, CA, United States of America

Charles R Meyer