Commissariat a L'energie Atomique Et Aux Energies Alternatives

Analytical Pixels Technology-Apix Technology

Charles-Marie Tassetti

Laurent Duraffourg

Frederic Progent

Eric Colinet

Philippe Andreucci

Jean-Sébastien Danel

Pierre Puget

Joshua B Whiting

Mélanie Petitjean

Peter Thomas Stevens

Joshua Whiting

Frédéric Progent

Jacques Haussy

André Tissot

The invention relates to a gas analysis system comprising, from upstream to downstream:

Gas analysis system comprising a gas spectrometer equipped with a micro-reflectron

A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

Micro-reflectron for time-of-flight mass spectrometer

A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimeters while its other dimensions are less than 10 times this thickness.

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Paris, France

Charles-Marie Tassetti