The Boc Group, Inc.

Charles K Carniglia

Ronald E Laird

John P Lehan

A broad-band multilayer antireflection coating comprising four layers designed for deposition in an inline magnetron sputtering machine. The optical thickness of the third layer from the substrate is less than one quarter of a wavelength in the center of the low-reflection band, and the second and fourth layers are made of silicon dioxide.

Broad-band antireflection coating having four sputtered layers

The use of a telecentric system allows for minimizing the changes in the measured radiometric quantity as a result of defocus or tilt of the object under measurement or of the detector. In a preferred embodiment, a telecentric illuminating system is provided, which illuminates an object from a source. A telecentric receiving system receives reflections from the object and relays them to a detector. In another preferred embodiment, a telecentric system is also described that is appropriate for radiance or radiant intensity measurements.

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Antioch, CA, United States of America

Charles K Carniglia