California Institute of Technology

Xponent Photonics Inc

Hoya Corporation USA

Charles I Grosjean

Yu-Chong Tai

Xing Yang

Xuan-Qi Wang

David W Vernooy

Joel S Paslaski

Franklin G Monzon

Hao Lee

Katrina H Nguyen

Henry A Blauvelt

Oskar Jon Painter

Paul Bridger

Ellis Fan-chuin Meng

Guido Hunziker

Henry A Blauvlet

An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.

Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof

An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having a device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The waveguide is end-coupled at its proximal end to the optical device through the device end face and is arranged so as to comprise a waveguide mode converter. The waveguide is arranged at its distal end to transmit or receive an optical signal through its distal end to or from another low-index optical waveguide end-coupled with the integrally-formed waveguide and assembled with the integrally-formed waveguide, optical device, or substrate. The optical apparatus can further comprise a discrete low-index optical waveguide assembled with the integrally-formed waveguide, optical device, or substrate so as to be end-coupled with the integrally-formed waveguide at its distal end.

An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.

Optical components may be aligned for transverse-optical coupling by: fabricating a first optical component on a substrate; fabricating an alignment member on the substrate suitably positioned relative to the first optical component; and assembling a second optical component onto the alignment member, thereby establishing transverse optical coupling between the optical components. The substrate may preferably be substantially planar. The alignment member may mechanically engage the second optical component so as to accurately establish and stably maintain transverse optical coupling. The first optical component and the alignment member may preferably be fabricated on the substrate using precision spatially selective materials processing techniques. Transverse optical coupling between two optical components may be stably maintained by substantially embedding transverse-coupled portions of the components in a substantially solid substantially transparent low-index medium. An alignment member may serve to accurately position the transverse-coupled components prior to embedding and hold them in place during embedding.

Alignment apparatus and methods for transverse optical coupling

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Micromachined parylene membrane valve and pump

A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.

MEMS valve

A micropump including a chamber plate with connected pumping chambers for accepting small volumes of a fluid and a pumping structure. The pumping structure includes a flexible membrane, portions of which may be inflated into associated pumping chambers to pump the fluid out of the chamber or seal the chamber. A working fluid in cavities below the flexible membrane portions are used to inflate the membrane. The cavities may include a suspended heating element to enable a thermopneumatic pumping operation. The pumping chambers are shaped to closely correspond to the shape of the associated flexible membrane portion in its inflated state.

Planar micropump

A silicone rubber diaphragm pump utilizing a pair of MEMS Parylene check valves and a miniature solenoid plunger and actuator is comprised of a spacer sandwiched by a silicone rubber diaphragm on one side and a check valve support on the other. The check valves in the check valve support form the inlet and outlet to a pumping chamber defined between the check valve support and silicone rubber diaphragm. The pumping action has been demonstrated by driving the silicone diaphragm with the plunger using the solenoid type actuator to generate over and under pressures in the chamber. This forces the pumped medium into and out of the chamber, thus allowing the medium to be transported. Tubing or connectors affixed to the inlet and outlet ports of the check valve support structure allow for external fluidic access. The pump works with both gas and liquid.

Growing community of inventors

Pasadena, CA, United States of America

Charles I Grosjean