Saes Pure Gas, Inc.

Entegris, Inc.

Saes Getters S.p.a.

Charles H Applegarth

D'Arcy H Lorimer

Matthew Browning

Sarah Vogt

Joshua T Cook

Rocky D Gipson

Marco Holzner

Marco Succi

Cristian Landoni

Matthew Schlotterbeck

Lawrence A Rabellino

Giorgio Vergani

Jeffrey L Briesacher

Gary Le

Luke D'Antonio

Lawrence Rabellino

Described are gas-processing systems that include a pre-heater, that are useful for processing a flow of gas flowing the gas to contact media (e.g., purification media, catalyst, adsorbent), and related methods.

Gas-processing systems and methods

Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.

Methods and systems for adsorbing organometallic vapor

Described are methods, devices, and systems useful for removing gaseous ammonia from a gas mixture at a pressure in an ambient pressure range by allowing the ammonia to adsorb onto a solid adsorbent, as well as related systems and methods.

Methods and systems for removing ammonia from a gas mixture

The present invention is embodied in a carbon dioxide compression and delivery device that uses a plurality of reversible thermoelectric devices and to a method to operate such carbon dioxide compression and delivery device.

Carbon dioxide compression and delivery system

An Ultra High Purity (UHP) carbon dioxide purification system and a method for purification of UHP carbon dioxide is disclosed. The purification system includes supported nickel oxide and supported palladium oxide. An upper portion of the purification system is at least partially filled with supported nickel oxide, and a lower portion of the purification system is at least partially filled with supported palladium oxide. The upper and lower portions of the purification system have a physical separation but are in fluid communication. The method includes purification or pre-purification of High Purity (HP) carbon dioxide to Ultra High Purity (UHP) levels including feeding carbon dioxide of High Purity grade or better to an Ultra High Purity carbon dioxide purification system.

System and method for ultra high purity (UHP) carbon dioxide purification

An apparatus for recycling exhaust gas includes a vessel containing a reversible ammonia sorber material which is exothermic when sorbing ('loading') ammonia and which is endothermic when releasing ('unloading') ammonia. A first valve selectively couples a source of exhaust gas including ammonia to a first port of the vessel, a second valve selectively couples a vacuum pump to the vessel, and a third valve selectively coupling a second port of the vessel to an output. A controller opens and closes the first valve, the second valve and the third valve to implement a loading phase, an intermediate venting phase and an unloading phase for the vessel.

Method and system for anhydrous ammonia recovery

The invention teaches a purification system which uses a series of operations, in a single unit, to purify air, while extending the life of the purification units. Air is passed through a coarse water trap to remove liquid. The semi-dry air, is then passed through adsorbers, which remove the remaining moisture and all the carbon dioxide in a purification process. The present invention flows the air to be purified through adsorption columns twice, before and after passing the air through an oxygen catalyst unit. The flows of air are then rotated to a third column, which is thermally regenerating with the facilitation of a regeneration air supply from the purified air.

Air purification system with regenerative purification units

A semiconductor manufacturing system includes a getter-based gas purifier coupled in flow communication with a gas distribution network for a semiconductor fabrication facility. The gas distribution network supplies purified gas to at least one wafer processing chamber in the semiconductor fabrication facility. The gas purifier includes a getter column having a metallic vessel with an inlet, an outlet, and a containment wall extending between the inlet and the outlet. Getter material which purifies gas flowing therethrough by sorbing impurities therefrom is disposed in the vessel. A first temperature sensor is disposed in a top portion of the getter material. The first temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates the presence of excess impurities in the incoming gas to be purified. A second temperature sensor is disposed in a bottom portion of the getter material. The second temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates that excess impurities are being backfed into the getter column. First and second high melting point, nonmetallic liners are disposed in the vessel such that at least some of the top and bottom portions, respectively, of the getter material is separated from the containment wall of the vessel. A getter-based gas purifier, a method of making an integrated circuit device, and a method of protecting a getter column are also described.

Semiconductor manufacturing system with getter safety device

The present invention provides a method and apparatus to purify various gases utilizing the superior performance a heated getter process in a smaller package than previous multiple stage, heated getter processes. The smaller package includes inner and outer enclosures, and an integral, regenerative heat exchanger to simultaneously increase heater efficiency and cool the purified gas. The invention also includes a particle filter to remove particles from the gas flow. The invention further provides an interface to various modular gas stick substrate designs with an inlet and an outlet in one end of the integrated heated getter purifier system. The inlet gas is preheated by the integral heat exchanger and then heated to operating temperature of 200-400&deg; C. The heated getter removes various impurities from the gas. The heated gas is then cooled in the integral heat exchanger. The cooled gas is exposed to a second quantity of cooler getter to remove residual impurities. The gas is then, preferably, filtered to remove particles before releasing to be utilized in semiconductor processing and integrated circuit device manufacturing and other industries.

Integrated heated getter purifier system

The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified gas; (c) cooling the purified gas to a temperature less than about 100.degree. C.; and (d) contacting the purified gas with a hydrogen sorbing gas to remove residual hydrogen. The system includes an improved heat exchange apparatus for cooling the purified gas and a low temperature hydrogen sorption apparatus.

Growing community of inventors

San Luis Obispo, CA, United States of America

Charles H Applegarth