Asml Netherlands B.v.

Oracle America, Inc.

Quantum Corporation

Charles E Kinney

Matthew Graham

Wayne J Dunstan

Jeroen Van Der Burgt

Aleksey M Urmanov

David K McElfresh

Anton A Bougaev

Kenneth Clayton Gross

Ming-Chih Weng

Dan Vacar

Donald A Kearns

Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam is focused on droplets of target material to generate plasma at a primary focal spot. Maintaining droplets at the primary focal spot during burst firing is difficult because generated plasma from preceding droplets push succeeding droplets out of the primary focal spot. Current droplet-to-droplet feedback control to re-align droplets to the primary focal spot is relatively slow. The system and method described herein adaptively pre-compensate for droplet push-out by directing droplets to a target position that is offset from the primary focal spot such that when a droplet is lased, the droplet is pushed by the laser beam into the primary focal spot to generate plasma. Over time, the EUV system learns to maintain real-time alignment of droplet position so plasma is generated consistently within the primary focal spot.

System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production

A tape drive () that receives a tape cartridge () having a tape () comprises a tape head () and a control system (). The tape head () transfers data between the tape drive () and the tape (). The control system () utilizes linear parameterization to control the position of the tape head () relative to the tape (). The control system () can include a compensator (J) and a filter (Q). The compensator (J) is a combination of the information contained in a nominal control system (A) and the information contained in a model of the servo system (B). The model of the servo system (B) estimates system disturbances that affect the tracking ability of the control system (). The filter (Q) filters the estimated system disturbances to generate a filtered system disturbance signal. The filtered system disturbance signal is then used to adjust the output of the compensator (J). Additionally, the control system () can utilize Youla-Kucera parameterization to control the position of the tape head () relative to the tape (). Further, the control system () controls the position of the tape head () relative to the tape () without the use of a feed-forward sensor.

Control system for tape drive to compensate for system disturbances without use of feed-forward sensor

Some embodiments of the present invention provide a system that attenuates noise from a fan exhaust of a computer system. During operation, the system monitors the noise from the fan exhaust and calculates a frequency spectrum of the noise from the monitored noise. Next, the system generates an antiphase spectrum from the frequency spectrum and generates a flow of air which exhibits a property of the antiphase spectrum. Finally, the system directs the flow of air into the fan exhaust so that the noise is attenuated by a reduction of turbulence in the fan exhaust by the flow of air.

Method and apparatus for attenuating fan noise through turbulence mitigation

A method of quantifying a shape of a surface includes measuring an elevation (z) of the surface at a plurality of locations in an x-y plane of the surface. The measurement data is fit to a series expansion in terms of one or more base functions that include a series expansion fit. A vector of shape coefficients are calculated from the series expansion fit. A vector of shape coefficients are output.

Surface shape metric and method to quantify the surface shape of electronic packages

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La Jolla, CA, United States of America

Charles E Kinney