Saint-gobain Abrasives, Inc.

Saint-gobain Abrasifs

Charles Dinh-Ngoc

Srinivasan Ramanath

Ramanujam Vedantham

Jianhui Wu

Taewook Hwang

Eric M Schulz

Thomas Puthanangady

J Gary Baldoni

An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate.

Abrasive tool for use as a chemical mechanical planarization pad conditioner

An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.

Corrosion-resistant CMP conditioning tools and methods for making and using same

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Holliston, MA, United States of America

Charles Dinh-Ngoc