USA As Represented by Secretary of the Navy

Charles A Young

Bruce D Geelhood

Stephen Douglas Russell

Shannon D Kasa

Stanley R Clayton

Oswald I Csanadi

Dennis M Silva

A method is provided for improving silicide formation, and the electrical ntact provided thereby, on non-planar silicon structures. In this method, a semiconductor device structure is initially formed having non-planar surface regions. A metal layer is deposited on the non-planar surfaces. The metal deposition process step is followed by an off-axis implantation of non-dopant ions, causing a mixing of the metal and silicon atoms at the metal and non-planar silicon structure interface. The off-axes implantation also serves to disrupt the native silicon dioxide layer between the silicon and metal layers regions. Thermal processing is then used to form silicide on the non-planar surfaces of the semiconductor silicon structure.

Method for forming improved electrical contacts on non-planar structures

A neutron detection apparatus is provided which includes a selected number of surfaces of lithium-6 coated wire mesh and which further includes a gas mixture in contact with each sheet of lithium-6 coated wire mesh for selectively reacting to charged particles emitted or radiated by the lithium-6 coated mesh. A container is provided to seal the lithium-6 coated mesh and the gas mixture in a volume from which water vapor and atmospheric gases are excluded, the container having one or more walls which are transmissive to neutrons. Monitoring equipment in contact with the gas mixture detects the generation of charged particles in the gas mixture and, in response to such charged particles, provides an indication of the flux of neutrons passing through the volume of the detector.

Lithium-6 coated wire mesh neutron detector

A neutron detector is disclosed which uses the moderating material as the structural support for the neutron detector element. A thin metal liner is affixed to the inside of the plastic moderating material encasement for containing a neutron detecting gas. A high voltage supply is connected to an electrical conductor which extends between the ends of the encasement and serves to furnish output pulses to a pulse counter upon the occurrence of ionization of the counting gas in response to neutron flux through the volume of the detector.

Lightweight neutron detector

A neutron detection apparatus is provided which includes a selected number f flat surfaces of lithium-6 foil, and which further includes a gas mixture in contact with each of the flat surfaces for selectively reacting to charged particles emitted by or radiated from the lithium foil. A container is provided to seal the lithium foil and the gas mixture in a volume from which water vapor and atmospheric gases are excluded, the container having one or more walls which are transmissive to neutrons. Monitoring equipment in contact with the gas mixture detects reactions taking place in the gas mixture, and, in response to such reactions, provides notice of the flux of neutrons passing through the volume of the detector.

Growing community of inventors

San Diego, CA, United States of America

Charles A Young