International Business Machines Corporation

Charles A Choate

Michael Raymond Lunn

An oxidation exhaust trap for filtering a particulate product of a first gas contacted with a gaseous oxidizing agent. The oxidation exhaust trap has a vessel having an interior cavity. The vessel further having a first inlet in communication with the interior cavity for introduction of the first gas into the interior cavity and a second inlet in communication with the interior cavity for introduction of the gaseous oxidizing agent into the interior cavity, the gaseous oxidizing agent mixing with the first gas thereby causing oxidation of the first gas for producing the particulate product suspended in a gaseous product. Lastly, the vessel has an outlet in communication with the interior cavity. A filter is disposed in the interior cavity for filtering the particulate product from the gaseous product which is exhausted through the outlet. In a preferred embodiment of the present invention, the first gas is silane and the gaseous oxidizing agent is air. Other aspects of the present invention are methods for filtering a particulate product of a first gas contacted with a gaseous oxidizing agent and a system for the same.

Silane oxidation exhaust trap

A high conductance trap for removing particulates from the effluent of a semiconductor processing system. The trap includes a housing having a gas inlet, a filtering arrangement, and a gas outlet. The gas inlet and gas outlet are arranged in an inline configuration to increase conductance through the trap, thereby enhancing the filtering efficiency of the filtering arrangement. Cooling coils are disposed immediately adjacent the gas inlet to immediately cool the effluent as it enters the trap, thereby further increasing the filtering efficiency of the filter arrangement.

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Underhill, VT, United States of America

Charles A Choate