Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Acm Research (Shanghai) Inc. (3 from 66 patents)
3 patents:
1. 12186684 - Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
2. 11925881 - Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
3. 11000782 - Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device