Skyverse Technology Co., Ltd.

Chaoqian Zhang

Le Yang

Lu Chen

Yanzhong Ma

A light emitting device, an optical detection system, an optical detection device and an optical detection method, the light emitting device comprising: a light source (), and an aperture limiting unit () located on an emergent light path of the light source (); the light source () is used to emit light; and the aperture limiting unit () is used to limit the aperture of light emitted by the light source () when a current detection area of an object to be tested () has a high aspect ratio structure so as to block a portion of light having a large included angle with the normal direction of the object to be tested ().

Light emitting device, optical detection system, optical detection device and optical detection method

Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample () to be tested, a first detection apparatus () and a second detection apparatus () can be switched by means of an objective lens switching apparatus (), so as to acquire height information and structure information of the sample () to be tested. In the process, the sample () to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample () to be tested avoided, and the probability of the sample () to be tested being polluted in the testing process reduced, but also a region to be tested of the sample () to be tested does not need to be determined repeatedly, improving the testing speed for the sample () to be tested.

Growing community of inventors

Beijing, China

Chaoqian Zhang