Taiwan Semiconductor Manufacturing Comp. Ltd.

Chao-Fan Chang

Gwo-Chiang Fang

Ju-Kau Chen

Oliver Wu

Ming-Feng Ou

Pai-Cheng Huang

Chin-Cheng Pan

Wen-Pin Wu

Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.

Wafer-based planning methods and systems for batch-based processing tools

System and method for monitoring a fabrication process. Generally, an actual-to-planned variance is calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the planned quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site. Furthermore, a planned-to-actual variance may be calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the actual quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site.

Fabrication monitoring system

A backup planning device within a fabrication system. The backup planning device schedules backup operations between separately located fabrication facilities by introducing a virtual tool. The capacity of the virtual tool is combined into first capacity information of a tool group to generate second capacity information thereof accordingly. The first capacity information comprises capacity information of effective tools in the respective tool group, while the second capacity information comprises capacity information of effective tools plus the virtual tool thereof. A first manufacturing plan for the tool group is determined according to a master production schedule, a WIP profile, and the second capacity information thereof. A second manufacturing plan is determined according to the workload allocation of the virtual tool in the first manufacturing plan.

System and method for fabrication backup planning

A method is provided for product culmination estimation in a microelectronics manufacturing environment. The method includes providing a manufacturing executing system including a plurality of processing entities. The manufacturing executing system provides interconnectivity and management of the processing entities. The method also assigns a standard queue time factor to product advancing through the manufacturing executing system, and determines an actual and theoretical cycle time and associated with the product through each process entity of the manufacturing executing system. The method further includes anticipating a target queue time for the product through the manufacturing executing system, and forecasting product cycle time of the product through the manufacturing executing system.

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Hsinchu, Taiwan

Chao-Fan Chang