Chinese Academy of Sciences

Changzhe Peng

Feng Tang

Xiangzhao Wang

Yunjun Lu

Yang Liu

Peng Li

Yisha Cao

Xiangyu Wei

Apparatus and method for detecting wavefront aberration of an objective lens, comprising a wavefront detection system, a planar mirror, and a planar mirror adjusting mechanism; the objective lens is placed between planar mirror and wavefront detection system; planar mirror is positioned at focal point of the objective lens. A test wavefront emitted by wavefront detection system passes through the objective lens, gets reflected by the planar mirror, and t passes through the objective lens again; the wavefront detection system receives and detects the test wavefront to derive a phase distribution thereof; an angle of the planar mirror tilts at is adjusted to obtain different return wavefronts; a polynomial for expressing wavefront aberration is selected, and expressions corresponding to all the return wavefronts are calculated; result of fitting the wavefront aberration of the objective lens when expressed by the selected polynomial is derived through fitting with the polynomial.

Apparatus and method for detecting wavefront aberration of objective lens

A light intensity fluctuation-insensitive projection objective wave aberration detection device and a detection method thereof, comprising a light source and illumination system, an object plane marking plate, an object plane displacement table, a tested projection objective, an image plane marking plate, a two-dimensional photosensor, an image plane displacement table and a control processing unit; the object plane marking plate and the image plane marking plate are provided with grating marks for shear interference test and marks for light intensity test, the shear interferograms and the light intensity information are simultaneously received through the two-dimensional photosensor, the light intensity fluctuation error corresponding to each phase-shifting interferogram is corrected through the light intensity information, improving the detection precision, reducing the complexity and the cost of the system, and improving the detection speed.

Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof

Projection objective wave-front aberration detecting device and a detecting method thereof, wherein the projection objective wave-front aberration detecting device comprises a light source and illuminating system, an object plane grating, an object plane displacement stage, a measured projection objective, an image plane grating, a two-dimensional photoelectric sensor, an image plane displacement stage and a control processing unit. According to the invention, by controlling the length of the object plane grating line, or the periodic structure of the object plane grating perpendicular to the shearing diffraction direction, or the object plane grating to adopt a sinusoidal grating, or the image plane grating to adopt an amplitude-phase hybrid grating, the complexity of an interference field is reduced, and the wave-front aberration detection speed and precision are improved, and the precision and speed of in-situ wave-front aberration detection can be improved.

Device and method for detecting projection objective wave-front aberration

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Shanghai, China

Changzhe Peng