Samsung Electronics Co., Ltd.

Changyul Cheon

Insang Song

Cimoo Song

Yongwoo Kwon

Seokjin Kang

Chungwoo Kim

Hoon Song

Jungwoo Kim

Youngwoo Kwon

Yong-Gyo Seo

A resonator including a lower substrate having a groove, a dielectric filling the groove, a material film formed on the inner wall of the groove, the material film for preventing the permittivity from suddenly changing between the lower substrate and the dielectric, an upper substrate that is combined with the lower substrate to form a cavity, a conductive thin film formed on the lower surface of the upper substrate to face the dielectric and having a slot in contact with the material film and exposing the dielectric, and a strip line for a wave-guide that is formed on the upper part of the upper substrate and is connected to the conductive thin film. According to the resonator, the size of a cavity corresponding to a given resonance frequency can be reduced by filling a cavity with a dielectric (or magnetic material).

Resonator

A cavity resonator for reducing the phase noise of microwaves or millimeter waves output from a monolithic microwave integrated circuit (MMIC) voltage controlled oscillator (VCO) by using silicon (Si) or a compound semiconductor and a micro electro mechanical system (MEMS), and a method for fabricating the cavity resonator are provided. In the cavity resonator, instead of a conventional metal cavity, a cavity, obtained by finely processing silicon or a compound semiconductor, is coupled to a microstrip line to allow the cavity resonator to be adopted in a reflection type voltage controlled oscillator. A pole is provided to connect the edge of the microstrip line to a predetermined location of a cavity lower thin film. A coupling slot is formed by removing a predetermined width of a cavity upper thin film adjacent to the pole which comes in contact with the cavity upper thin film. A resistive thin film for impedance matching is formed around the cavity lower thin film which comes in contact with the pole. Consequently, the cavity resonator reduces the phase noise of microwaves or millimeter waves which are output from a voltage controlled oscillator.

Cavity resonator for reducing phase noise of voltage controlled oscillator and method for fabricating the same

There is provided a cavity resonator for reducing the phase noise of electromagnetic waves output from a monolithic microwave integrated circuit (MMIC) voltage controlled oscillator (VCO) by utilizing a semiconductor (e.g., silicon, GaAs or InP) micro machining technique. In the cavity, instead of an existing metal cavity, a cavity, which is obtained by micro machining silicon or a compound semiconductor, is coupled to a microstrip line to allow the cavity resonator to be adopted in a reflection type voltage controlled oscillator. A coupling slot is formed by removing a predetermined size of the part of an upper ground plane film of a cavity facing to the microstrip line. Consequently, the cavity resonator reduces the phase noise of microwaves or millimeter waves which are output from a voltage controlled oscillator.

Cavity resonator for reducing phase noise of voltage controlled oscillator

Growing community of inventors

Seoul, South Korea

Changyul Cheon