Beijing Sevenstar Flow Co., Ltd.

Changhua Mu

Bowen Deng

Yitao Zou

A mass flow controller includes control module, fluid passage, flow regulating valve, flow sensor disposed between inlet and flow regulating valve, and pressure sensor disposed at outlet. The control module is configured to enter pressure feedback regulation mode when variation amount of target flow value exceeds preset threshold, and enter flow feedback regulation mode after fluid flow value detected by flow sensor meets first stabilization condition. The control module is configured to, in pressure feedback regulation mode, perform calculation according to fluid pressure value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount. The control module is also configured to, in flow feedback regulation mode, perform calculation according to fluid flow value and target flow value to obtain opening regulation amount, and regulate opening degree of flow regulating valve according to opening regulation amount.

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Beijing, China

Changhua Mu