Samsung Electronics Co., Ltd.

Chang-Su Lim

Suk-Hee Im

Sun-Wook Park

Yo-Han Ahn

Jung-Sung Hwang

A contamination control apparatus includes at least two pipes connected by a joint portion and configured to allow a processing fluid to flow therethrough, and a cover configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion. An inlet port is connected to the cover and configured to supply a gas to the cavity. An outlet port is connected to the cover and configured to exhaust the gas and a contaminant from the cavity.

Contamination control apparatus, management system and related methods

An apparatus for cleaning air, and a method for cleaning air using the apparatus, includes a housing including an air inlet through which air to be cleaned flows into the housing and an air outlet through which air that has been cleaned is exhausted from the housing, the housing isolating an interior thereof from external surroundings. A first filtering unit is disposed adjacent to the air inlet and includes a plurality of first filters for removing a first group of contaminants from the air to be cleaned. Each of the plurality of first filters is disposed substantially parallel to each other. A fan for drawing the air to be cleaned into the housing from the external surroundings is disposed in the housing.

Apparatus and method for cleaning air

A fresh air duct is configured to direct fresh air filtered by an air conditioning system towards a clean room downstream from the fresh air duct, the fresh air having a first level of particle density. A separate particle filter in the fresh air duct, located downstream from the air conditioning system and upstream from the clean room, is configured to further filter the fresh air to provide filtered fresh air having a second level of particle density therein that is less than the first level. Related methods are also disclosed.

Growing community of inventors

Gyeonggi-do, South Korea

Chang-Su Lim