Samsung Electronics Co., Ltd.

Chang-su Lim

Hyun-joon Kim

Sue-ryeon Kim

Hyeog-Ki Kim

Youn-soo Han

Il-kyoung Kim

Hun-Jung Yi

Kun-hyung Lee

Seung-Ki Cha

Ok-sun Lee

An air purifying apparatus includes an air flow generating device for generating a flow of air, a nozzle spraying water to the air flowing through the air flow generating device, a plasma module performing a plasma reaction on the air containing the water sprayed from the nozzle, and oxidizing NOx in the air and converting it into NO, an eliminator eliminating the NOconverted in the plasma module and the water contained in the air and passing pure air through the eliminator and out of the air purifying apparatus and a water tank storing the water received from the eliminator, thereby heightening the removal efficiency of NOx from the air.

Apparatus for purifying air and purifying method thereof

A dustproof fabric for use in manufacturing a smock to be worn in a clean room of a semiconductor fabrication facility includes an inner layer of a knitted fabric, an intermediate layer attached to the inner layer and formed of a non-micro porous polyurethane resin film possessing a high degree of moisture absorbency, and an outer layer attached to the intermediate layer and formed of a high density polyester woven fabric containing conductive yarn in the warp and weft.

Dustproof smock for use in a clean room, fabric for use in manufacturing the smock, and method of manufacturing the fabric

A dust-proof fabric is disclosed. The fabric comprises an inner knit fabric layer, an intermediate layer of a moisture absorbent polyurethane film and a high density woven polyester fabric outer layer. The outer layer contains a first set of spaced apart conductive yarns aligned with one another in the warp direction and a second set of spaced apart conductive yarns aligned in the weft direction.

Dustproof fabric worn in a clean room

An auxiliary device is used in the exchanging of a filter in a clean room having a production section, and a filter frame including a filter-supporting portion which supports the filter and an extending portion which extends from the filter-supporting portion toward the production section. The auxiliary device includes a block plate to be inserted in the extending portion of the filter frame, a support supporting the bottom of the block plate and facing an inside wall of the second portion of the filter frame, and an inflatable tube disposed along the circumference of the support. The tube is inflated to press outwardly and seal the device in the filter frame, thereby blocking the flow of any unfiltered air past the filter and into the production section. Thereafter, the filter is removed and a new filter is set in its place. Finally, the tube is deflated so as to free the device from the filter frame. Accordingly, the production operation as well as the circulation of cleaning air can proceed while the filter is being exchanged.

Method of exchanging filters in a clean room and auxiliary device for

A method and an apparatus for testing the filtration efficiency of cloth materials intended for use as garments, masks, or gloves in a clean room environment where semiconductor chips are fabricated. The apparatus includes a support for holding the sample of cloth material to be tested; a gas ionizer for introducing an ionized gas into a chamber; an optional humidifier for introducing water vapor into the chamber; a particle generator for introducing particles into the chamber; and a particle counting assembly for counting the number of particles introduced into the chamber before and after they pass through the sample of cloth material being tested. Particles are introduced into the chamber after the static in the chamber has been removed by ionized gas, and the temperature and humidity in the chamber have been optionally adjusted. Filtration efficiency is determined by counting the total number of particles introduced into the chamber and the number of particles that pass through a sample of cloth material. Based on the filtration efficiency, the useful life of dust free clothes made out of the cloth material and worn by clean room operators can be determined.

Growing community of inventors

Hwaseong-si, South Korea

Chang-su Lim