Samsung Display Co., Ltd.

Samsung Mobile Display Co., Ltd.

Chang-Soon Ji

Jong-Woo Lee

Tae-Seung Kim

Chengguo An

Tae-Wook Kang

Jeong-Yeol Lee

Hye-Yeon Shim

Sang-Jin Han

Won-Seok Cho

Jae-Mork Park

Ou-Hyen Kim

Kyung-Soo Min

Hyun-Lae Cho

Do-Sung Kwon

Cheng-Guo An

Hey-Yeon Shim

Yong-Hun Jo

A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.

Deposition source

A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate.

Substrate plasma-processing apparatus

A deposition source capable of uniformly producing a deposition film. The deposition source includes a furnace, a first heating unit surrounding the furnace to heat the furnace and a second heating unit spaced-apart from the first heating unit by an interval and surrounding the furnace to heat the furnace, wherein the second heating unit comprises a plurality of separate sub-heating units that surround the furnace.

A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

A crucible assembly for deposition and an inner plate used in the crucible assembly. The crucible assembly includes a main body having an inner space accommodating a deposition material and an opening arranged at an upper portion of the inner space, a cap having an aperture arranged at a top of the main body and combined with the main body and an inner plate arranged between the main body and the cap, the inner plate covering the opening of the main body, the crucible assembly including inner channels arranged to allow vapor of the deposition material from the inner space of the main body to be expelled to an outside of the aperture in the cap via a space arranged between an outer side surface of the inner plate and an inner side surface of the cap.

Inner plate and crucible assembly for deposition having the same

Growing community of inventors

Yongin, South Korea

Chang-Soon Ji