Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semes Co., Ltd. (2 from 772 patents)
2 patents:
1. 11127573 - Support unit, apparatus and method for treating a substrate
2. 10607818 - Support unit, apparatus and method for treating a substrate