Average Co-Inventor Count = 10.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,906 patents)
2. Eo Technics Co., Ltd (1 from 25 patents)
2 patents:
1. 11764064 - Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
2. 11158510 - Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer