Samsung Electro-Mechanics Co., Ltd.

Samsung Electronics Co., Ltd.

Chang-bin Lim

Jae-cheol Lee

Chan-ho Pak

Ju-hee Cho

Kwi-young Han

Yury N Yuryev

A reaction apparatus for atomic layer deposition includes a vacuum chamber having a gas inlet, a gas outlet, and a gas flow path for connecting the gas inlet and the gas outlet; a reactor located in the vacuum chamber, including a reaction chamber where a first gas, which is input through the gas flow path, reacts with a specimen in the reaction chamber, the reactor further including a gas distributor, which is located in the reaction chamber to evenly supply the gas; a specimen location controller for moving the specimen located in the vacuum chamber to the reaction chamber; and an analyzer, which is connected to the reaction chamber, for analyzing a second gas generated in the reaction chamber. The apparatus is able to deposit uniform atomic layers on a specimen by maintaining the pressure and flow of reactant gas and can deposit and analyze an atomic layer simultaneously.

Reaction apparatus for atomic layer deposition

An electron spectroscopic analyzer using X-rays is provided. The electron spectroscopic analyzer includes an X-ray generator for generating X-rays, an optical system for detecting charged particles emitted from an object irradiated with the X-rays to analyze the object, a vacuum system whose inside is maintained at a low pressure near to vacuum pressure, the vacuum system being provided between the X-ray generator and the optical system, and a blocking unit provided between the X-ray generator and the optical system for preventing elements other than the X-rays emitted from the X-ray generator from flowing into the optical system.

Electron spectroscopic analyzer using X-rays

A catalyst for purifying exhaust gases from diesel engines with an improved purification efficiency for both nitrogen oxide and particulates in exhaust emissions is provided. The catalyst includes: (i) a first catalytic layer containing a carrier portion including iron (Fe)-doped modified zirconium dioxide, and a catalyst portion including a material selected from the group consisting of copper (Cu), copper oxide, and mixtures thereof, and (ii) a second catalytic layer containing a carrier portion including Cu-doped modified zirconium dioxide, a main catalyst portion including platinum (Pt) and tin (Sn), and a co-catalyst portion including copper oxide. The catalyst portion of the first catalytic layer may contain palladium (Pd) instead of Cu.

Catalyst for purification of exhaust gas from diesel engine

A ceramic heater for a gas sensor has a heater substrate, a laminating substrate made of the same material as the heater substrate, and an electrode made of platinum and at least one lanthanide oxide disposed between the heater substrate and the laminating substrates. The ceramic heater exhibits improved durability without migration patterns, is free of cracks on the substrate, is free of short circuits in the heat electrode and is low in production cost.

Heater for heating an automobile sensor

A wide-range air fuel ratio oxygen sensor including a pump cell, a sensor cell, and a porous diffusion layer interposed between the pump cell and the sensor cell and a method for fabricating the oxygen sensor. The oxygen sensor generates output pumping current with a very small dispersion range of about .+-.2% by virtue of the activation effect of the catalyst such as Pt mixed into Al.sub.2 O.sub.3 of the porous diffusion layer.

Growing community of inventors

Seoul, South Korea

Chang-bin Lim