Applied Materials, Inc.

Chandra Mohapatra

Errol Antonio C Sanchez

Abhishek Dube

Shu-Kwan Danny Lau

Martin Jeffrey Salinas

Ala Moradian

Zuoming Zhu

Manjunath Subbanna

Erika R Warrick

The present disclosure relates to methods of correlating zones of processing chambers, and related systems and methods. In one implementation, a method of correlating zones of a processing chamber includes partitioning the processing volume into a plurality of zones along a first direction of the processing volume and a second direction of the processing volume. The second direction intersects the first direction. The plurality of zones have a first zone number (m), and a second zone number (n). The method includes determining a group number. The determining of the group number includes multiplying a first value by a second value. The first value correlates to a first zone number (m) of a plurality of zones and the second value correlates to a second zone number (n) of the plurality of zones. The method includes grouping the zones into groups having a number that is equal to the group number.

Methods of correlating zones of processing chambers, and related systems and methods

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San Jose, CA, United States of America

Chandra Mohapatra