Samsung Electronics Co., Ltd.

Chaemook Lim

Sun Ho Kim

Dongouk Kim

Dongjoon Lee

Seok Heo

YoungBum Kim

JaeChul Hwang

Ohhyuk Kwon

Yeongrack Son

Kwanghyeon Jeong

Woohee Kim

A process apparatus includes a heating module and a supporter disposed below the heating module. A process space is provided between the heating module and the supporter. The heating module includes a housing, at least one heating lamp disposed in the housing, at least one temperature sensor disposed in the housing, and a blocking plate disposed under the housing. The blocking plate spatially separates the at least one heating lamp from the process space, and the blocking plate includes at least one window spatially connecting the at least one temperature sensor to the process space.

Process apparatus including a non-contact thermo-sensor

A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.

Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method

Growing community of inventors

Yongin-si, South Korea

Chaemook Lim