Semes Co., Ltd.

Chae Young Lim

Do Gyeong Ha

Moon Soon Choi

Gu Yeol An

Bu Young Jung

Tae Suk Yun

Jae Hyeok Yu

Gun Min Lee

Provided are a treating liquid providing unit capable of predicting a temperature change of a substrate treating liquid by adding an inflow amount or consumption amount of the substrate treating liquid as a control factor, and a substrate treating apparatus including the same. The treating liquid providing unit includes a treating liquid storage module for storing the substrate treating liquid, a treating liquid heating module for heating the substrate treating liquid, a treating liquid discharging module for discharging the substrate treating liquid, a treating liquid supplying module for supplying the substrate treating liquid to the treating liquid storage module when the substrate treating liquid is discharged, and a control module for predicting the temperature of the substrate treating liquid remaining in the treating liquid storage module based on the inflow amount of the substrate treating liquid.

Chemical liquid providing unit and substrate treating apparatus including the same

The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.

Unit for storing liquid and apparatus for treating substrate

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a liquid supply unit configured to supply a treating liquid onto the substrate supported on the support unit, and wherein the liquid supply unit comprises: a tank configured to have an accommodation space for storing the treating liquid therein; a circulation line configured to circulate the treating liquid stored in the accommodation space; a supplementary line configured to supply the treating liquid to the accommodation space, and at which a valve is installed; a heater installed at the circulation line, and for heating the treating liquid; and a controller is configured to control the valve and the heater.

Unit for supplying liquid, apparatus and method for treating substrate with the unit

A portable device for attaching a contact lens to an eye includes a first clamp including a first grip portion having a first grip hole and a first arm including two branches extending from the first grip portion, each branch extending obliquely and being bent, and a second clamp having a shape identical to the shape of the first clamp, the second clamp including a second grip portion having a second grip hole and a second arm, wherein the first arm and the second arm are coupled to each other so as to intersect each other about a pivot point, and a first eye opening means and a second eye opening means are installed at tip ends of the first arm and the second arm, respectively, each eye opening means being configured to be brought into tight contact with a corresponding eyelid.

Growing community of inventors

Cheonan-si, South Korea

Chae Young Lim