Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Imec

Universitécatholique De Louvain (Ucl)

Universitè Catholique De Louvain

Cedric Rolin

Jan Genoe

A method for forming an organic material layer on a substrate in an in-line deposition system is disclosed. In one aspect, the organic material is deposited with a predetermined non-constant deposition rate profile, which includes a first predetermined deposition rate range provided to deposit at least a first monolayer of the organic material layer with a first predetermined average deposition rate and a second predetermined deposition rate range provided to deposit at least a second monolayer of the organic material layer with a second predetermined average deposition rate. The injection of organic material through the openings of the injector is controlled for realizing the predetermined deposition rate profile.

Growing community of inventors

Auderghem, Belgium

Cedric Rolin