S.o.i.tec Silicon on Insulator Technologies

Altatech Semiconductor

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Unity Semiconductor Corporation

Cécile Moulin

Christophe Maleville

Aomar Halimaoui

Philippe Gastaldo

Guillaume Rodriguez

Jean-Luc Delcarri

François Berger

Sophie Moritz

Patrice Belin

A method for detecting surface defects, such as slip line type defects, on a substrate designed to be used in electronics, optoelectronics or analogue, including projection of a pattern of light fringes and dark bands onto the substrate, relative displacement of the substrate relative to the pattern, acquisition of a sequence of at least three images of the pattern reflected by the substrate to a sensor, the images corresponding to displacement of the fringes of the pattern, determination of the gradient of the surface of the substrate using displacements of fringes of the pattern, and determination of the presence of a surface defect on the substrate using variations in the gradient of the surface of the substrate. Another embodiment comprises a device using said method.

Method for detecting surface defects on a substrate and device using said method

Growing community of inventors

Seyssinet-Pariset, France

Cécile Moulin