Semi-gas Systems, Inc.

Cathy L Cowan

Stephen Y Lau

Lau Y Hong

A docking station with a filter that sits inline in a process gas channel and that alternatively receives a loopback plate, a sensor plate and a removable purifier cartridge for particle removal as well as the removal of trace amounts of moisture, oxygen, and other chemical impurities from a gas stream. The removable purifier cartridge comprises a purifying medium with a pair of sealing poppet valves that automatically close when the cartridge is removed from the docking station. A block body is included in the docking station with gas line fittings for close gland-to-gland separations, while the purifier cartridge is off to one side, and not positioned directly in line between the glands.

Process gas docking station with point-of-use filter for receiving

A filter-purifier that removes particles as well as trace amounts of moisture, oxygen, and other chemical impurities from a gas stream. The filter-purifier includes a removable canister that contains a purifying medium and a pair of sealing poppet valves that automatically close when the canister is removed from an in-line block body. The block body includes gas line fittings with close gland-to-gland separations, since the canister is off to one side and not positioned directly in line between the glands.

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San Jose, CA, United States of America

Cathy L Cowan