Stmicroelectronics S.a.

Catherine Mallardeau

Thomas Skotnicki

Pascale Mazoyer

Marc Piazza

Malgorzata Jurczak

St&eacute;phane Monfray

This integrated circuit comprises a capacitor () formed above a substrate () inside a first cavity in a dielectric and comprising a first electrode, a second electrode, a thin dielectric layer placed between the two electrodes, and a structure () for connection to the capacitor. The connection structure is formed at the same level as the capacitor in a second cavity narrower than the first cavity, the said second cavity being completely filled by an extension of at least one of the electrodes of the capacitor.

Integrated circuit, its fabrication process and memory cell incorporating such a circuit

The invention concerns a method which consists in forming on a substrate () coated with a dielectric material layer () provided with a window (), a stack of successive layers alternately of germanium or SiGe alloy () and polycrystalline silicon (); selective partial elimination of the germanium or SiGe alloy layers, to form an tree-like structure; forming a thin layer of dielectric material () on the tree-like structure; and coating the tree-like structure with polycrystalline silicon (). The invention is useful for making dynamic random-access memories.

Method for making a stack of capacitors, in particular for dynamic random access memory [DRAM]

There is provided an integrated circuit having active components including junctions formed in a monocrystalline substrate doped locally, and at least one passive component situated above the active components. The integrated circuit includes a first insulating layer separating the active components and abase of the passive component, and a metal terminal for electrically connecting the passive component with at least one of the active components. The metal terminal is formed in the thickness of the first insulating layer and has a contact surface that projects from the limits of a junction of the one active component. In a preferred embodiment, the passive component is a capacitor. Also provided is a method of fabricating an integrated circuit that includes MOS transistors and an onboard memory plane of DRAM cells in a matrix.

Integrated circuit including active components and at least one passive component associated fabrication method

A process for making a DRAM-type cell includes growing layers of silicon germanium and layers of silicon, by epitaxy from a silicon substrate; superposing a first layer of N&plus; doped silicon and a second layer of P doped silicon; and forming a transistor on the silicon substrate. The method also includes etching a trench in the extension of the transistor to provide an access to the silicon germanium layers relative to the silicon layers over a pre-set depth to form lateral cavities, and forming a capacitor in the trench and in the lateral cavities.

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Grenoble, France

Catherine Mallardeau