Credence Systems Corporation

Dcg Systems Gmbh

Catherine Kardach

Theodore R Lundquist

Erwan Le Roy

William B Thompson

Mark Alan Thompson

Jan Durec

In one embodiment, a method for aligning an image of a semiconductor device with a bitmap representation thereof includes receiving diffusion layer information of at least a portion of the semiconductor device, receiving implant layer information of the at least a portion of the semiconductor device, deriving distinct p- and n-doped region information from the received diffusion and implant layer information, generating the bitmap representation, including a differentiation between the distinct p- and n-doped regions, and performing an alignment operation of the image of the semiconductor device with generated bitmap representation.

P and N region differentiation for image-to-CAD alignment

The backside navigation method of the present invention includes milling a fiducial opening through the substrate of an integrated circuit. The milling process is stopped when the fiducial opening reaches the bottom of a trench isolation structure. The trench isolation structure delineated by the fiducial opening may be imaged and registered to a computer aided design layout image to achieve sub-micron navigation resolution.

Method and system for integrated circuit backside navigation

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Saratoga, CA, United States of America

Catherine Kardach