Teledyne Scientific and Imaging, LLC

Casey King

Keisuke Shinohara

Miguel Urteaga

Eric Regan

Avijit Bhunia

Ya-Chi Chen

Andy Carter

Laterally-gated transistors and lateral Schottky diodes are disclosed. The FET includes a substrate, source and drain electrodes, channel, a gate electrode structure, and a dielectric layer. The gate electrode structure includes an electrode in contact with the channel and a lateral field plate adjacent to the electrode. The dielectric layer is disposed between the lateral field plate and the channel. The lateral field plate contacts the dielectric layer and to modulate an electric field proximal to the gate electrode proximal to the drain or source electrodes. Also disclosed is a gate electrode structure with lateral field plates symmetrically disposed relative to the gate electrode. Also disclosed in a substrate with dielectric structures buried in the substrate remote from the gate electrode structure. A lateral Schottky diode having an anode structure includes an anode (A), cathodes (C) and lateral field plates located between the anode and the cathodes.

Laterally-gated transistors and lateral Schottky diodes with integrated lateral field plate structures

An ohmic contact for a multiple channel FET comprises a plurality of slit-shaped recesses in a wafer on which a multiple channel FET resides, with each recess having a depth at least equal to the depth of the lowermost channel layer. Ohmic metals in and on the sidewalls of each recess provide ohmic contact to each of the multiple channel layers. An ohmic metal-filled linear connecting recess contiguous with the outside edge of each recess may be provided, as well as an ohmic metal contact layer on the top surface of the wafer over and in contact with the ohmic metals in each of the recesses. The present ohmic contact typically serves as a source and/or drain contact for the multiple channel FET. Also described is the use of a regrown material to make ohmic contact with multiple channels, with the regrown material preferably having a corrugated structure.

Ohmic contact for multiple channel FET

A FET with a buried gate structure. The FET's gate electrode comprises a plurality of buried gate structures, the tops of which extend above the substrate's top surface and the bottoms of which are buried to a depth at least equal to that of the bottom of the channel layer, or the 2DEG plane within a channel layer for a HEMT, such that the buried gate structures contact the channel layer only from its sides. A head portion above and not in contact with the substrate's top surface contacts the tops of and interconnects all of the buried gate structures. Drain current is controlled by channel width modulation by lateral gating of the channel layer by the buried gates structures. The FET may include at least one field plate which comprises a slit structure in which the field plate is divided into segments.

FET with buried gate structure

A FET employing a micro-scale device array structure comprises a substrate on which an epitaxial active channel area has been grown, with a plurality of micro-cells uniformly distributed over the active channel area. Each micro-cell comprises a source electrode, a drain electrode, and at least one gate electrode, with a first metal layer interconnecting either the drain or the source electrodes, a second metal layer interconnecting the gate electrodes, and a third metal layer interconnecting the other of the drain or source electrodes. Each micro-cell preferably comprises a source or drain electrode at the center of the micro-cell, with the corresponding drain or source electrode surrounding the center electrode. The number and width of the gate electrodes in each micro-cell may be selected to achieve a desired power density and/or heat distribution, and/or to minimize the FET's junction temperature. The FET structure may be used to form, for example, HEMTs or MESFETs.

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Ventura, CA, United States of America

Casey King