Robert Bosch

Carsten Geckeler

Thorsten Balslink

Johannes Classen

Frank Fischer

Burkhard Kuhlmann

Daniel Christoph Meisel

Jens Frey

Torsten Ohms

Lars Tebje

Joerg Hauer

Udo-Martin Gomez

Guenther-Nino-Carlo Ullrich

Sebastian Guenther

Martin Wrede

Nicole Schittenhelm

A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner.

Getter device for a micromechanical component

An inertial sensor, comprising a substrate and a rocker that is connected to the substrate via a spring apparatus, the spring apparatus having at least two springs for suspending the rocker on the substrate, the two springs being disposed with an offset from one another with reference to their longitudinal axis.

Inertial sensor with overlapping torsional springs

A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

Micromechanical yaw-rate sensor

A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure.

Yaw rate sensor and method for operating a yaw rate sensor

Growing community of inventors

Tuebingen, Germany

Carsten Geckeler