Apjet, Inc.

Carrie E Cornelius

Gregory A Roche

David W Tyner

Joseph H Cross

An atmospheric pressure plasma processing apparatus and method employing argon as a plasma gas in the absence of helium, including nanosecond pulse-powered electrodes having planar surfaces, and grounded electrodes having planar surfaces parallel to the surfaces of the powered electrodes and spaced-apart a chosen distance therefrom, forming plasma regions, are described. The absence of helium from the plasma discharge has been found not to affect the quality of the resulting plasma-polymerized coatings of the processed substrates.

Atmospheric-pressure plasma processing apparatus and method using argon plasma gas

A plasma processing apparatus including powered electrodes having elongated planar surfaces; grounded electrodes having elongated planar surfaces parallel to and coextensive with the elongated surfaces of the powered electrodes, and spaced-apart a chosen distance therefrom, forming plasma regions, is described. RF power is provided to the at least one powered electrode, both powered and grounded electrodes may be cooled, and a plasma gas is flowed through the plasma regions at atmospheric pressure; whereby a plasma is formed in the plasma regions. The material to be processed may be moved into close proximity to the exit of the plasma gas from the plasma regions perpendicular to the gas flow, and perpendicular to the elongated electrode dimensions, whereby excited species generated in the plasma exit the plasma regions and impinge unimpeded onto the material.

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Durham, NC, United States of America

Carrie E Cornelius