Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Schneider Electric Industries Sas

Soitec

Caroline Coutier

Bruno Ghyselen

Philippe Robert

Laurent Duraffourg

Lamine Benaissa

Gweltaz Gaudin

Emmanuel Ollier

Laurent Chiesi

Sylvie Genies

Stephane Fanget

Bruno Fain

Thierry Verdot

Stéphane Fanget

Christian Bataille

Benoît Grappe

Mélanie Alias

Sophie Mailley

Thierry Salvetat

Sylvain Paineau

Amalia Garnier

Estelle Le Baron

A method for sealing cavities using membranes, the method including a) forming cavities arranged in a matrix, of a depth p, a characteristic dimension a, and spaced apart by a spacing b; and b) forming membranes, sealing the cavities, by transferring a sealing film. The method further includes a step a1), executed before step b), of forming a first contour on the front face and/or on the sealing face, the first contour comprising a first trench having a width L and a first depth p1, the formation of the first contour being executed such that after step b) the cavities are circumscribed by the first contour, said first contour being at a distance G from the cavities between one-fifth of b and five b.

Method for sealing cavities using membranes

The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Compact photoacoustic detection device

A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around the assembly formed by the central cavities, and forming central membranes and peripheral membranes covering the central cavities and peripheral cavities, respectively, by the transfer of a coverage film on the front face of the support substrate. At least part of the peripheral membranes is removed.

Method for manufacturing a plurality of resonators

An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.

Acoustic microelectronic device

A device for managing an accumulator, including: a plurality of strain gauges including at least three strain gauges, the strain gauges being arranged to measure stresses along at least three distinct stress axes; a measuring device measuring strains undergone by each gauge along its stress axis; a reversible electrical switch; a calculating device controlling opening and closing of the electrical switch, depending on measurements carried out by the measuring device.

Device for managing an accumulator

A microsystem, including a magnetic microactuator, with a mobile element supported by a substrate and controlled by magnetic effect between a first position and a second position for switching at least one electric circuit. A permanent magnet or a solenoid subjects the mobile element to a first uniform magnetic field to hold the mobile element in the first position. An energizing coil external to the substrate, on energizing, subjects the mobile element to a second magnetic field to move the mobile element from the first position to the second position, the energizing coil being of solenoid type and surrounding the substrate supporting the mobile element.

Microsystem with electromagnetic control

Growing community of inventors

Grenoble, France

Caroline Coutier