Physik Instŕumente (pi) Gmbh & Co. Kg

Physik Instrumente Gmbh & Co. Kg

Carolin Walenda

Christian Rudolf

Axel Grabowski

Michael Katzschmann

Hans-Ulrich Mohr

Christoph Schäffel

Rainer Glöβ

Rainer GlÖß

The invention relates to a sensor device and method for detecting measurement data relating to the absolute position of a linearly or rotationally moveable body, comprising an optical sensor system, wherein the optical sensor system uses exclusively zero-order rejections for the position measuring, and a magnetic sensor system which emits a second sensor output signal depending on the position to be determined of the moveable body, wherein the gauge of the optical sensor system and the gauge of the magnetic sensor system are integrated in a common gauge body, and a computer unit which is provided to obtain the first sensor output signal and the second sensor output signal and to generate a common sensor output signal from the first sensor output signal and the second sensor output signal, wherein the current period of the second sensor system can be deduced from the first sensor output signal at every time, in order to calculate clear absolute position information based on the first and second sensor output signal.

Sensor device

A high-resolution positioning device has a stator and a rotor, a coil array, arranged on the stator, and having at least three groups of flat coils, wherein each group has at least two single coils and the coil array encloses a free space on the stator, also having permanent magnetically-excited circuits that are situated on, against or in the rotor and form a magnet array which likewise encloses a free space, wherein the free spaces accommodate a position measuring system which has a measuring head having sensors, and an area scale. The device is in the form of a freely suspended, magnetically controlled six-dimensional drive, wherein the measuring head is situated in the coil array free space and the area scale is situated in the magnet array free space, and the rotor is free of drive-related electrical or electronic and, in this regard, live parts.

High-resolution positioning device

Growing community of inventors

Karlsruhe, Germany

Carolin Walenda