Leica Microsystems Wetzlar Gmbh

Leica Microsystems Semiconductor Gmbh

Carola Blaesing-Bangert

Ulrich Kaczynski

Klaus Rinn

Mathias Beck

The invention discloses a substrate holder () that is configured to receive a substrate () and can be utilized to determine the thickness deviation of a substrate from the standard thickness of a specific substrate type. The substrate holder () comprises a one-piece frame having a flat upper surface (). An opening () that defines a peripheral rim () is provided in the substrate holder (). Receiving elements () on which spheres are provided are shaped onto the peripheral rim () of the opening (). A substrate () placed into the substrate holder () thus comes to rest on the upper surfaces of the spheres. The support elements () are arranged on the peripheral rim of the opening () in such a way that they lie at the vertices of an equilateral triangle. In addition, the spacing from the upper surface of the spheres to the flat upper surface () of the substrate holder () is dimensioned such that said spacing corresponds substantially to the standard thickness of the substrate type being used.

Substrate holder, and use of the substrate holder in a highly accurate measuring instrument

The invention discloses a substrate holder ( ) that is configured to receive a substrate ( ) and can be utilized to determine the thickness deviation of a substrate from the standard thickness of a specific substrate type. The substrate holder ( ) comprises a one-piece frame having a flat upper surface ( ). An opening ( ) that defines a peripheral rim ( ) is provided in the substrate holder ( ). Receiving elements ( ) on which spheres are provided are shaped onto the peripheral rim ( ) of the opening ( ). A substrate ( ) placed into the substrate holder ( ) thus comes to rest on the upper surfaces of the spheres. The support elements ( ) are arranged on the peripheral rim of the opening ( ) in such a way that they lie at the vertices of an equilateral triangle. In addition, the spacing from the upper surface of the spheres to the flat upper surface ( ) of the substrate holder ( ) is dimensioned such that said spacing corresponds substantially to the standard thickness of the substrate type being used.

A coordinate measuring stage includes a stationary base part having a linear X guidance element, a center part slidable along the linear X guidance element, and an X-Y-positionable stage body for reception of a substrate, the X-Y positionable stage body being movable slidingly alone the Y guidance element. The center part is arranged in freely suspended fashion over the base part and supported at one end on the Y guidance element and with at another end on another support element. The Y guidance element, the other support element, and the stake body are supported, slidably and independently of one another, on the surface of the base part.

Coordinate measuring stage and coordinate measuring instrument

An apparatus and method for loading substrates of various sizes into a substrate holder. The apparatus for this purpose comprises a base plate with peripheral rim and at least three support means arranged on the base plate, each of which has configured on it different support surfaces for the various substrates. The support surfaces are arranged in stepped fashion on the support means. In addition, receiving elements for the substrate holder are arranged on the base plate in such a way that the substrate holder that is set in place surrounds the support means and is aligned and oriented in terms of its position. At least one sensor element is housed in at least one of the support surfaces of a support means for one substrate size, so as thereby to detect the size of the substrate.

Apparatus and method for loading substrates of various sizes into substrate holders

A device and method for delivering various substrates into a high-precision measuring instrument. The device comprises a magazine in which are configured several compartments in which substrate holders for different substrates can be deposited. Also provided is a loading station in which the substrate holders can be loaded with the substrate that matches the substrate holder. An automatic transfer device removes substrate holders from the magazine and introduces them into the loading station, or removes the substrate holders together with the introduced substrate from the loading station. The automatic transport device is configured as a robot arm at whose front end sits a fork.

Device and method for delivering various transparent substrates into a high-precision measuring instrument

A measuring device for measuring structures on a transparent substrate includes an incident-light illuminating device, an imaging device, and a detector device for the imaged structures and a measuring stage for receiving the substrate. The stage is displaceable in an interferometrically measurable fashion perpendicularly to and relative to an optical axis of the imaging device. The measuring stage is designed as an open frame with a receiving edge for the substrate. A transmitted-light illuminating device is provided beneath the measuring stage. The optical axis of the transmitted light illuminating device is aligned with that of the incident-light illuminating device.

Method and device for measuring structures on a transparent substrate

A method is provided for measuring structures on a mask surface in which the mask is supported on a measuring stage that is interferometrically measurably displaceable perpendicularly to an optical axis of an image-measuring system. A mask coordinate system associated with the mask is aligned using alignment marks relative to a measuring device coordinate system. With set positions of the structures in the mask coordinate system being specified in advance, the positions of at least two external edges of the mask in the mask coordinate system that are perpendicular to one another are measured in addition to the actual positions of the structures in the mask coordinate system.

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Huettenberg, Germany

Carola Blaesing-Bangert