Honeywell G.m.b.h.

Honeywell International Inc.

Other

University of Minnesota

Carol M Ford

Theodore J Podgorski

Randy J Ramberg

William P Platt

Daniel W Youngner

Klein L Johnson

J David Zook

Charles T Sullivan

Anand Gopinath

Theordore J Podgorski

A method of bonding and packaging components of Micro-Electro-Mechanical Systems (MEMS) and MEMS based devices using a Solid-Liquid InterDiffusion (SLID) process is provided. A micro-machine is bonded to a micro-machine chip using bonding materials. A layer of chromium is first deposited onto surfaces of the micro-machine and the micro-machine chip followed by a layer of gold. Subsequently, a layer of indium is deposited between the layers of gold, and the surface of the micro-machine is pressed against the surface of the micro-machine chip forming a gold-indium alloy to serve as a bond between the micro-machine and the micro-machine chip. In addition, a cover is bonded to the micro-machine chip in the same manner providing a hermetic seal for the MEMS based device.

Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices

A method for fabricating a magneto-optic modulator, such as for use with a solid state ring resonator gyroscope. The method includes inducing a magnetic field at a substrate holder as a layer of magnetic material is being deposited on a substrate. The magnetic field helps to optimally orient the deposited magnetic material layer to improve the characteristics of the magneto-optic modulator. In addition to inducing a magnetic field, a low energy ion beam may be applied to optimize orientation. The method can be used to fabricate a magneto-optic modulator on a substrate containing a partially fabricated ring resonator without destroying previously fabricated components.

Method for fabricating a magneto-optic modulator

An electroluminescent substance suitably comprising a conducting material such as a conducting oxide and at least one light-emitting dopant is disclosed. Preferred embodiments of the electroluminescent substance include rare earth dopants present within the conducting oxide such that the dopant materials generate light when electrically stimulated. Common dopant materials include erbium, ytterbium, praseodymium and other rare earth elements. The electroluminescent material is suitable for use, for example, in an electronic display or as a light source for many applications including Sagnac rotation sensors such as fiber optic gyroscopes.

Electroluminescent material comprising a doped conducting oxide

A method for bonding a gyroscope component to a gyroscope body using the solid liquid Inter Diffusion (SLID) process. The resulting bond structure has a larger operating range than the bonding-materials used to create to bond. Mating material layers may be added to the bond to improve bonding between the bonding materials and the component and between the bonding materials and the gyroscope body.

Solid liquid inter-diffusion bonding for ring laser gyroscopes

An apparatus and method for prevention of migration of mobile ions in a gyroscope. A dielectric barrier material layer is placed between a gyroscope body and one or more gyroscope components. The dielectric barrier material layer reduces the electric field formed in the gyroscope block, and thus reduces ion migration therein. The material may prevent mobile ions from reaching the cathode seal.

Cathode seal including migration resistant dielectric material

A waveguide optical amplifier include a substrate and a guiding or active layer. The substrate has a substrate surface and a substrate index of refraction. The guiding layer is of Zirconium dioxide (ZrO.sub.2) and/or Alumina (Al.sub.2 O.sub.3) and is carried on a cladding layer over the substrate surface. The guiding layer has a guiding layer index of refraction which is higher than the cladding index of refraction. The Zirconium dioxide guiding layer is doped with rare earth materials.

Waveguide optical amplifier

An optical waveguide is created using the process of ion beam deposition resulting in a waveguide with low propagation loss, mode discrimination, and gain characteristics. The waveguide is made up of a multilayer stack which is deposited upon a thermally stable substrate, wherein the multilayer stack comprises alternating layers of a first material and a second material. The layers of second material are doped with a rare earth material. By pumping the waveguide with a pump light source, interaction between the pump light and the rare earth material within the waveguide causes amplification or gain of a first optical signal. Ion beam deposition is used to fabricate the waveguide, therefore production of a high quality rare earth doped waveguide is possible. Furthermore, the waveguide is made using batch processing thus reducing costs.

Ion-beam deposited, gain enhanced ring resonators

A process for fabricating a diode laser is disclosed which allows the laser to be easily aligned with other components. Furthermore, the disclosed method provides a means for fabricating an entire diode laser upon a single substrate, thus eliminating the complexity of positioning and alignment. Ion beam deposition is used to create many of the components, thus forming very efficient and very uniform components.

Method of fabricating diode lasers using ion beam deposition

A sintered dense laser block constructed of ceramic metal composition manufactured through sintering, conventional machining and electro discharge machining. A ceramic metal powder and binder are combined and shaped into a laser block. The laser block is then sintered to permit electro-discharge machining. After detailed machining various subsequent firings will yield different dielectric properties for the laser block. Other laser gyro ceramic parts may be manufactured with the method of the invention such as mirror assemblies, cathodes and laser path length controllers. The electro-discharge machining permits the construction of complex ceramic shapes from a slurry of powdered ceramic metal and binder which has been extruded or shaped and then conventional machined. The resulting part is cheaper and easier to make and the electro-discharge machining provides a method of creating very complex shapes in the part.

Sintered dense laser block

An optical waveguide is formed by depositing multiple layers of thin films using the process of ion beam sputter deposition. The waveguide is made up of alternating layers of a first material and a second material wherein the two materials have differing indices of refraction and low optical loss. These materials are deposited upon a thermally stable substrate creating a multilayer stack which functions as a waveguide. The multilayer waveguide has ultra low propagation losses and good mode discrimination, thus being very efficient for use in single mode applications. The waveguide is easily adaptable to batch processing which reduces costs and increases the performance of the waveguide.

Ion-beam deposited multilayer waveguides and resonators

A cathode for use in a gas discharge device that is resistant to sputtering and therefore extends the life of the gas discharge device. The configuration of the cathode effectively uses the hollow cathode effect allowing the laser to operate with a lower excitation voltage. That configuration involves a body having a cavity therein and an entrance port to the cavity. Within the cavity there exists a protrusion extending from an interior surface toward the entrance port.

Toroidal cathode

A cathode for a laser generator includes a monolithic substrate consisting essentially of a nonconductive material and including a thin film of a conductive material deposited thereon. The substrate has an inner and outer surface, the thin film substantially contiguously covers the substrate and prevents exposure of the substrate over the life of the cathode, and the conductive thin film is oversprayed onto a portion of the substrate's outer surface so as to allow electrical contact from the outer surface to the inner surface.

Be coated glass cathode with high concentration of beo

A cathode for a laser generator consists of a monolithic body consisting essentially of beryllium and beryllium oxide where the beryllium oxide has a concentration greater than 4%. The monolithic substrate may be comprised of a conductive or nonconductive material. A thin film of beryllium having a controlled amount of BeO is deposited onto the substrate so as to be thick enough to continuously cover the substrate and so as to prevent exposure of the substrate over the life of the cathode. The BeO content is greater than 4.0%. The BeO layer is deposited by a conventional thin film deposition method such as e-beam deposition, i-beam deposition, molecular beam epitaxy or other deposition processes. The BeO may advantageously be deposited using a Be target with a 4.0% BeO content, a Be target in an oxygen atmosphere, or a Be and a BeO target sputtered together.

Growing community of inventors

Columbia Heights, MN, United States of America

Carol M Ford