American Air Liquide, Inc.

John Zink Company, LLC

Koch-glitsch, Inc.

Air Liquide America, L.p.

Carol Ann Schnepper

Roger L Poe

Richard T Waibel

I-Ping Chung

Michael G Claxton

Jesse Steven Chambers

Jaiwant D Jayakaran

Marianne Zimola

Darin Robert Foote

Christoph Ender

Dana G Laird

Tracey Jacksier

Joseph E Paganessi

Richard J Udischas

Brian D Albert

Ronald S Inman

Richard A Sauer

Mindi Xu

Benjamin Jurcik

James J F McAndrew

Christine E Boisrobert

Miles S Bajcar

Dmitry Znamensky

Robert W Conners

Tsz-Ching J Yuan

Michael Thaler

John-Luc Hubert

Compact low NOgas burner apparatus and methods for discharging fuel gas and air mixtures into furnace spaces wherein the mixture is burned in folded flame patterns and flue gases having low NOcontent are formed are provided. A burner apparatus of the invention is basically comprised of a housing having a burner tile attached thereto and means for introducing air therein. The burner tile has an opening therein with a wall surrounding the opening which extends into a furnace space. The exterior sides of the wall are divided into sections by radially positioned baffles with alternate sections having the same or different heights and slanting towards the opening at the same or different angles. Primary fuel gas mixed with flue gases and air is discharged through the burner tile. Secondary fuel gas is discharged adjacent to the external slanted wall sections whereby the secondary fuel gas mixes with flue gases in the furnace space. The resulting fuel gas-flue gases streams mix with the fuel gas-flue gases-air mixture discharged through the burner tile and the resulting mixture is burned in the furnace space.

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A mass transfer column includes a feed device that is used to de-entrain liquid and more uniformly distribute vapor across a horizontal cross section of the column after a vapor or mixed phase stream has been directed into the column through a radially oriented feed nozzle. The feed device includes an annular passageway formed in the spacing between the column shell and an inner wall spaced inwardly from the shell. A deflector with oppositely directed deflecting surfaces is positioned at an inlet from the feed nozzle to the annular passageway and splits the vapor or mixed phase stream into two roughly equal streams that flow in opposite circumferential directions in the annular passageway. At least one pair of turning vanes is spaced on opposite sides of the deflecting surfaces in the annular passageway to create subpassages through which the vapor or mixed phase stream flows. The subpassages reduce the amount of vapor or mixed phase stream flow that impacts against the inner wall of the feed device at the inlet. The turning vanes unexpectedly reduce the pressure drop that occurs as the vapor or mixed phase stream is redirected from its radial entry direction to the circumferential direction in the annular passageway. By reducing the pressure drop, improvements in product yield and vapor distribution can be achieved.

Fluid stream feed device for mass transfer column

Anti-swirl baffles are provided in a mass transfer column to reduce the swirling motion of a vapor or mixed phase feed stream introduced into the column. The column is of the type having an upper region of a preselected diameter, a lower region of reduced diameter, and an intermediate transition region that has a diameter that transitions from the preselected diameter of the upper region to the reduced diameter of the lower region. The column includes a vapor or mixed phase feed nozzle and a feed device such as a vapor horn located at least partially within the upper region for delivering the vapor or mixed phase feed stream into the column. The anti-swirl baffles are positioned in the intermediate transition region of the column to disrupt the swirling motion of the vapor or mixed phase feed stream as portions of it descend from the feed device into the transition region of the column. An annular shield positioned in the transition region and spaced inwardly of the column shell defines a liquid flow passage that is shielded from the swirling motion of the vapor or mixed phase feed stream to reduce liquid entrainment.

Method and apparatus for facilitating more uniform vapor distribution in mass transfer and heat exchange columns

Compact low NO gas burner apparatus and methods for discharging fuel gas and air mixtures into furnace spaces wherein the mixture is burned in folded flame patterns and flue gases having low NO content are formed are provided. A burner apparatus of the invention is basically comprised of a housing having a burner tile attached thereto and means for introducing air therein. The burner tile has an opening therein with a wall surrounding the opening which extends into a furnace space. The exterior sides of the wall are divided into sections by radially positioned baffles with alternate sections having the same or different heights and slanting towards the opening at the same or different angles. Primary fuel gas mixed with flue gases and air is discharged through the burner tile. Secondary fuel gas is discharged adjacent to the external slanted wall sections whereby the secondary fuel gas mixes with flue gases in the furnace space. The resulting fuel gas-flue gases streams mix with the fuel gas-flue gases-air mixture discharged through the burner tile and the resulting mixture is burned in the furnace space.

Compact low NOx gas burner apparatus and methods

Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.

Method and system for preventing deposition on an optical component in a spectroscopic sensor

Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in communication with the vaporization purification bed to provide a liquefied gas to the bed with an ultra-pure chemical gas generated in the purification bed. The purified gas is subsequently routed to a buffer tank and to a point of use therefrom.

System and method for purifying and distributing chemical gases

Systems and processes are described for sanitizing a food product with ozone gas. The ozone gas is generated using a low pressure, low volume ozone gas generator and is delivered to a fluid injector. The fluid injector receives high pressure carrier fluid from a carrier fluid source and causes the ozone to be entrained in a stream of carrier fluid. The entrainment is created by passing the carrier fluid through a venturi diffuser inside the injector which creates a negative pressure in the sanitizing fluid line, thus drawing the sanitizing fluid into the carrier fluid and creating a highly homogenized fluid jet. The fluid jet is then injected into a container which contains a food product to be sanitized by the ozone. The container may also be provided with a mixing paddle to vigorously mix the food product while the ozone/carrier fluid jet is injected into the food product, which further ensures that the food product is contacted with sanitizing ozone gas. The container can be sealed to be pressurized by the ozone/carrier fluid jet by selective opening and closing of a vent. The ozone/carrier fluid jet may also be selectively humidified before injection into the container.

Process and equipment for sanitizing and packaging food using ozone

Growing community of inventors

Tulsa, OK, United States of America

Carol Ann Schnepper