Agilent Technologies, Inc.

Carmelo Quartarone

Vincenzo Pandolfo

Silvio Giors

Luca Bonmassar

Aldo Crisi

Alessandro Follo

In a vibration damper of a turbomolecular vacuum pump, a vacuum tightness function and a vibration damping function are both performed by one ore more toroidal rings made of an elastic material. The elastic rings assume a resting configuration while the vacuum pump is not operating and the damper is at atmospheric pressure, and they assume a compressed configuration while the vacuum pump is operating and the damper is under vacuum conditions. In the compressed configuration, the elastic rings are deformed due to a compression force. This deformation of the elastic rings prevents metal-to-metal contact between the vacuum pump and a vacuum chamber to which the pump is connected through the damper.

Vibration damper for vacuum pumps

In a vibration damper of a turbomolecular vacuum pump, a vacuum tightness function and a vibration damping function are both performed by one or more toroidal rings made of an elastic material. The elastic rings assume a resting configuration while the vacuum pump is not operating and the damper is at atmospheric pressure, and they assume a compressed configuration while the vacuum pump is operating and the damper is under vacuum conditions. In the compressed configuration, the elastic rings are deformed due to a compression force. This deformation of the elastic rings prevents metal-to-metal contact between the vacuum pump and a vacuum chamber to which the pump is connected through the damper.

A support for a rolling bearing of the kind equipped with an outer rotating ring for a rotary vacuum pump, the support comprising an inner portion that can be associated with the rotating ring, a fastening outer portion and a connecting portion, interposed between the inner and outer portions, wherein the connecting portion is a frusto-conical resilient element.

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Carmelo Quartarone