Ford Motor Company Limited

Carlton S Avant

Paul E Stevenson

Charles F Eagen

Described is a method of manufacturing a silicious micro-valve comprising the steps of providing a first silicious substrate; removing a portion of the first substrate to reveal the 111 planes of the first substrate; drawing an epitaxial layer to conform to the 111 planes of the first substrate; and assembling the first substrate and the epitaxial layer as two separate identical pieces to form a micro-valve having 111 planes.

Method of manufacturing a micro-valve

Described is a microvalve comprised of a movable spool and/or seat comprising a silicious spool having three planes, e.g. three planes aligned with all of the spool's planes, and a silicious seat conforming to the spool's planes. The spool and/or the seat may move to open or close the valve.

Growing community of inventors

Southfield, MI, United States of America

Carlton S Avant