The University of British Columbia

Carlos D Gerardo

Robert Rohling

Edmond Cretu

Methods and techniques for fabricating layered structures, such as capacitive micromachined ultrasound transducers, as well as the structures themselves. The layered structure has a membrane that includes a polymer-based layer and a top electrode on the polymer-based layer. The membrane is suspended over a closed cavity and may be actuated by applying a voltage between the top electrode and a bottom electrode that may be positioned along or be a bottom of the closed cavity. The layered structure may be fabricated using a wafer bonding process.

Layered structure and method for fabricating same

Methods and techniques for fabricating layered structures using surface micromachining are described. A sacrificial layer is deposited on a substrate assembly that functions as a bottom electrode. The sacrificial layer is patterned into a first shape. A first polymer-based layer is deposited on the sacrificial layer. A top electrode is patterned on the first polymer-based layer above the sacrificial layer. A second polymer-based layer is deposited on the top electrode such that the top electrode is between the first and second polymer-based layers. The sacrificial layer is etched away to form a cavity under the top electrode.

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Vancouver, Canada

Carlos D Gerardo