Dow Global Technolgoies LLC

Rohm and Haas Company

Dow Silicones Corporation

Carlos A Escobar Marin

Yinzhong Guo

James M Lipovsky

Ludwik S Cygan

Liang Chen

Amit K Chaudhary

Douglas J Hasso

Joseph Jacobs

Methods and apparatus for etching a high aspect ratio feature in a stack on a substrate are provided. The feature may be formed in the process of forming a 3D NAND device. Typically, the stack includes alternating layers of material such as silicon oxide and silicon nitride or silicon oxide and polysilicon. WFis provided in the etch chemistry, which substantially reduces or eliminates problematic sidewall notching. Advantageously, this improvement in sidewall notching does not introduce other tradeoffs such as increased bowing, decreased selectivity, increased capping, or decreased etch rate.

Waterborne dispersion composition

Methods for preparing waterborne heat seal coating compositions are disclosed, including (A) melt blending an ethylene vinyl acetate copolymer, a tackifier, and a wax in a first mixing apparatus to form a melt blend, (B) contacting the melt blend with an initial aqueous stream comprising a neutralizing agent, water, and a surfactant in an emulsification zone of the second mixing apparatus to form a dispersion, and (C) diluting the dispersion with water in a dilution zone of the second mixing apparatus to form the waterborne heat seal coating composition. Methods for preparing waterborne heat seal coating compositions are also disclosed, including (A) melt blending an ethylene vinyl acetate copolymer, a tackifier, and a wax in a mixing and conveying zone of a mixing apparatus to form a melt blend, (B) contacting the melt blend with an initial aqueous stream comprising a neutralizing agent, water, and a surfactant in an emulsification zone of the mixing apparatus to form a dispersion, and (C) diluting the dispersion with water in a dilution zone of the mixing apparatus to form the waterborne heat seal coating composition, wherein the length-to-diameter ratio of the extruder mixing apparatus is greater than or equal to 12 to 1. Waterborne heat seal coating compositions prepared according to the disclosed methods are also disclosed.

Methods for preparing waterborne heat seal coating compositions

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Midland, MI, United States of America

Carlos A Escobar Marin