University of Michigan

Carli Huber

Kira Barton

Neil P Dasgupta

Tae Han Cho

Eric Kazyak

Lauren Ransohoff

Ellis Herman

Mattison Rose

Orlando Trejo

Christopher P Pannier

Tae H Cho

An integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for conducting nanofabrication includes an electrohydrodynamic jet printing station that includes an E-jet printing nozzle, a spatial atomic layer deposition station that includes a zoned ALD precursor gas distributor that discharges linear zone-separated first and second ALD precursor gases, a heatable substrate plate supported on a motion actuator controllable to move the substrate plate in three dimensions, and a conveyor on which the motion actuator is supported. The conveyor is operative to move the motion actuator between the electrohydrodynamic jet printing station and the spatial atomic layer deposition station so that the substrate plate is conveyable between a printing window of the E-jet printing nozzle and a deposition window of the zoned ALD precursor gas distributor, respectively. A method of conducting area-selective atomic layer deposition is also disclosed.

Integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for area selective-atomic layer deposition

Growing community of inventors

Norwalk, CT, United States of America

Carli Huber