Kla Tencor Corporation

Kla Corporation

Icos Vision Systems, Naamloze Vennootschap

Carl Truyens

Christophe Wouters

Tom Marivoet

Erik De Block

Bruno Accou

Bert Vangilbergen

Jimmy Vermeulen

Karel Van Gils

Kc Leung

Kw Cheung

An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.

Apparatus, method and computer program product for defect detection in work pieces

A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.

Pick-and-place head and method for picking work-pieces

An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.

Apparatus, method and computer program product for inspection of at least side faces of semiconductor devices

A flipping apparatus, a system for processing articles comprising a said flipping apparatus, and a method for processing articles are provided. An article is picked by a first flipping arm. The first flipping arm rotates from a pick position into a pass position, at which the article is passed to a second flipping arm, which is in a receive position. The second flipping arm rotates from the receive position to a place position and places the article. By the passing of the article from the first to the second flipping arm and the rotations a flipping of the article is achieved. The first flipping arm and the second flipping arm each rotate at a higher speed when not carrying an article than when carrying an article. In addition, first and/or second flipping arm may perform a translation movement.

Flipping apparatus, system and method for processing articles

An apparatus for automatic pitch conversion for pick and place heads, comprising at least one auto pitch station for adjusting a pitch in a X-coordinate direction and/or adjusting a pitch in a Y-coordinate direction of pickers/grippers of a pick and place heads; a first actuator, operated by a motor gear assembly of the at least one auto pitch station, wherein the first actuator changes the pitch in the X-coordinate direction distance between rows of pickers/grippers of the respective pick and place head; and a second actuator operated by the same motor gear assembly, wherein the second actuator changes the pitch in the Y-coordinate direction between the pickers/grippers within a row of the respective pick and place head. A method for automatic pitch conversion of pick and place heads and a pick and place head and a pick and place device.

Apparatus and method for automatic pitch conversion of pick and place heads, pick and place head and pick and place device

A method for positioning electronic devices into compartments of an input medium is disclosed. At least one electronic device is packable in a single compartment of the input medium. Known positions on an upper side of the input medium are imaged by an inspection device. Actual position data of the compartments of the input medium are calculated on the basis of images of the known positions, given target position data of the known positions, and given target position data of the compartments of the input medium. A pick and place device for the electronic devices is controlled on the basis of the calculated actual position data of the compartments of the input medium. A method for determining the actual positions of compartments of an output medium is disclosed with analogous steps, whereby the electronic devices are picked-up from compartments of the input medium, transferred to compartments of the output medium, and placed into the compartments of the output medium. Arrangements for positioning a plurality of electronic devices into compartments of an input medium and compartments of an output medium are also disclosed.

Method and arrangement for positioning electronic devices into compartments of an input medium and output medium

Device for transferring electronic components () from a inclined gravity supply track () to another element, more particularly a receiving element (), characterised in that it comprises at least one swing arm () fixed to an inclined rotating shaft () that is connected to driving means () and that is positioned between the supply track () and the receiving element (), whereby the swing arm () forms an angle (C) with the rotating shaft () and is at least rotatable between a first position, whereby it is situated parallel to and above the supply track (), and a second position whereby the swing arm () is situated above the receiving element (), said device () further comprising suction means to suck up and to hold a concerned component () against the swing arm ().

Growing community of inventors

Rotselaar, Belgium

Carl Truyens