Icos Vision Systems Nv

Kla Tencor Corporation

Carl Smets

Karel Van Gils

Christophe Wouters

Steven Boeykens

Maarten Van Der Burgt

Ludo Verluyten

Jurgen Everaerts

John Zabolitzky

August Smeyers

John Zabolitsky

An object carrier, a system and a method is disclosed for the back light inspection of transparent or semitransparent objects. The carrier has a carrier base layer with photo luminescent properties which carries the transparent or semitransparent object on top of the layer. The transparent or semitransparent object could be a wafer and the object carrier could be a wafer chuck. At least one light source being arranged above the object carrier such that excitation light emitted from the at least one light source is directed through the transparent or semitransparent object to the layer with photo luminescent properties. The light returned from the layer with photo luminescent properties is collected by an objective and registered by a sensor.

Object carrier, system and method for back light inspection

A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask being mounted on a scanning member provided for moving the mask over successive positions over a predetermined distance. The device further comprises a confocal objective provided for mapping at successive object-position-in-focus the array of small spots output at said successive positions. The confocal objective may be mounted at a fixed position within said device.

Device for measuring in three dimensions a topographical shape of an object

A method and an apparatus for measuring respective positions of a set of N contact elements of an electronic component. A first and a second light path are created by a first and a second light beam which have different viewing angles. Both the first and the second light path can selectively be opened and both end into the image plane of a single camera. The positions being determined by using the first and second image produced by the first and second light beam respectively.

Method and an apparatus for measuring positions of contact elements of an electronic component

A method and an apparatus for measuring respective positions of a set of contact elements of an electronic component, wherein the contact elements are illuminated with a light source producing a light with an incident angle of at the most 20&deg; and wherein a first respectively a second image is recorded of said elements by means of a first respectively a second camera which are set up over a triangulation angle with respect to each other.

Measuring positions of coplanarity of contract elements of an electronic component with a flat illumination and two cameras

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Haasrode, Belgium

Carl Smets